Saturday, October 31, 2015

Wet Benches San Jose


Meeting Specifications. Exceeding Expectations

We manufacture a complete line of Dry In/Dry Out Wet Chemical Process Equipment & More.

Wafer Process Systems Inc. is committed to providing the highest quality products available in today’s marketplace. This is apparent by our industry first three year warranty for all products manufactured by us.

Wafer Process Systems Inc. uses only the highest quality electrical components, fluid components and control systems thus reducing equipment down time and providing the highest return on investment at the lowest cost of ownership as measured by SEMI RAM data.

Wafer Process Systems Inc. adheres to industry standards in all designs as defined by SEMI S2, NEC, NFPA and Factory Mutual 4910 guide lines to insure operator safety and equipment safety at the same time reducing facility risk.


Wafer Process Systems Inc. personnel are the most experience and professional in the industry and provide support to meet all of our customers needs.

Too find out more information about what we do and what we can do for you, Please don't hesitate to give us a call today or by CLICKING HERE

WPS
(408) 445-3010



Monday, September 28, 2015

Wet Process Equipment


Wet Process Equipment for all of your needs.

Wafer Process Systems Inc. is Leading Supplier of Wet Chemical Process Equipment to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, Disc Drive and Flat Panel Display manufacturing industries since 1983

Our Mission

Wafer Process Systems, Inc. is committed to providing the highest quality products available in today's marketplace. This is apparent by our industry's three year warranty for all of our products manufactured by us. We use only the highest quality electrical components, fluid components, and control systems thus reducing equipment down time and providing the highest return on investment at the lowest cost of ownership as measured by SEMI RAM data. Our personnel are the most experienced and professional in the industry and provide support to meet all of our customer needs.

Field Service & Spare parts

Having trouble contacting your original equipment supplier for service related issues?Are you experiencing any of the following equipment related issues?

  • Programming or software related issues.
  • Rebuilding your pneumatic pumps every month.
  • Equipment leaking.
  • Need periodic maintenance on your existing equipment.

If you answered yes to any of the above items, give us a call today. Wafer Process Systems, Inc. Employs full time field service engineering personnel to assist in repairs and upgrades of your existing wet process equipment including most of our competitors. To find out more information, CLICK HERE Today!

Are you curious about what we do? Follow the link that applies to you today.

Wet Benches
IPA Aerosol Dryer
Plating Equipment 
Conveyorized Equipment
We hope to here from all of you soon, please give us a call today!

-WPS 
(408) 445-3010






Monday, August 31, 2015

IPA Dryer

Welcome to Wafer Process Systems

Wafer Process Systems has manufactured equipment for the
semiconductor, solar, bio-med and disc industries since 1983


Have you ever considered the use of an IPA Dryer for your wet process? If yes, Wafer Process Systems would like to offer our domestic customers a 45 day demo of our Particle Neutral IPA Aerosol Dryer which is based on the proprietary Liquid Diffusion Technology. Please contact us for more information

IPA Aerosol Dryer with Liquid Diffusion Technology

Wafer Process Systems, Inc. Liquid Diffusion Technology (LDT) provides enhanced drying performance for a variety of substrates and material surfaces. This proprietary drying process and its subsystems control the creation of an ultra-pure IPA aerosol layer that moves across a motionless substrate to diffusively remove water, without leaving watermarks. The Venturi Aerosol Generator and its subsystem efficiently creates the ultra-pure IPA aerosol layer with the robust process flexibility necessary to dry high aspect ratio / deep trench topography, half-pitch wafer spacing, and a wide variety of other applications. This subsystem uses no energy to passively create a unique range of IPA aerosols that other IPA dryers simply cannot create. Furthermore, using an IPA aerosol in itself eliminates the safety hazard of IPA vapor dryers. Wafer Process Systems, Inc.  Passive Aerosol Dryers provide an efficient and clean drying system that is safe and environmentally-friendly.

OR

Are you having trouble contacting your supplier for service related issues or updates?

  • Programming or Software issues
  • Rebuilding your pneumatic pumps every month
  • Equipment leaking
  • Periodic maintenance on your equipment
Look no further...

Here at Wafer Process Systems, Inc. we employ full time service engineering personnel that can assist you in repairs and upgrades of your existing wet process equipment. 

For more information, please call us today at (408) 445-3010


We hope you all have a wonderful week,

Thursday, March 26, 2015

Semi-Automated Biomedical Wet Bench Overview
Wafer Process Systems Inc. automation concepts which incorporate Dual Axis Linear or Rotary Motion Positioning Systems in either pneumatic or servo applications provide a wide range of cost effective methods for substrate handling. Automated Wafer Transfer Systems are designed to accommodate a wide range of substrate sizes ranging from 100mm to 300mm single or dual wafer cassettes. Systems are available in multi substrate size capabilities which make it ideal for Fab transitions or for wafer reclaim processes which require various size substrate processing capabilities. The operator interface is via a touch screen panel which provides full graphical display of all positioning system parameters. The touch screen control incorporates an alarm status panel which prompts the operator in the event of any alarm conditions and a maintenance screen which allows maintenance personnel the ability to control all functions manually or in an automatic mode.
Model WPS-1000-FA-A-2002-3001Semi-Automated Front and Rear Access Batch Chemical Process System
Model WPS-1000-FA-A-2002-3001
The Wafer Process Systems Inc. Model WPS-1000-FA-A-2002-3001 incorporates a Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations. The systems is designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities. The positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements.
Model WPS-700-RA-A-150-200-1Rear Access Semi-Automated 150 MM Batch Chemical Process System
Model WPS-700-RA-A-150-200-1
The Wafer Process Systems Inc. Model WPS-700-RA-A-150-200-1 incorporates Linear Servo Positioning Systems for two process vessel front to rear configurations which use independent PLC controllers for each process module. All modules operated independently of each other and are provided with a UPS for additional product safety in the event of power outages. Operator interface is via a Colored Touch Screen located on front control panel. The PLC based controllers permit both manual and automated operation of the Servo Positioning System. 
Model WPS-600-PVC-C, Y/Z/ Theta SeriesSemi-Automated Front and Rear Access Batch Chemical Process System
Model WPS-600-PVC-C, Y/Z/ Theta Series
The Wafer Process Systems Inc. Model WPS-600-PVC-C incorporates a Linear Servo Positioning Systems with a Rotary Theta Axis for multiple process vessel configurations. The systems is designed to accommodate single 75 mm, 100 mm and 150 mm wafer cassette handling to provide broader process capabilities. The Theta axis allows for front and rear process vessel configuration. The positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements.
Model WPS-400PVC-C, Y/Z SeriesSemi-Automated Front and Rear Access Batch Chemical Process System
Model WPS-400PVC-C, Y/Z Series
The Wafer Process Systems Inc. Model WPS-400PVC-C, incorporates a Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations. The systems are designed to accommodate single 75 mm, 100 mm and 150 mm wafer cassette handling to provide broader process capabilities.
Model WPS-800-FA-A-2001-3001Semi-Automated Front Access Batch Chemical Process System
Model WPS-800-FA-A-2001-3001
The Wafer Process Systems Inc. Model WPS-800-FA-A-2001-3001 incorporates a Linear Pneumatic Positioning Systems for two process vessel configuration. The systems are designed to accommodate single 200 MM and 300MM wafer cassette to provide broader process capabilities. The positioning system movement is performed by pneumatic linear actuators with flow precision controls for smoother movements that are protected by Gortex Bellows.
Model WPS-900-FA-A-2002-3001Semi-Automated Front Access Batch Chemical Process System
Model WPS-900-FA-A-2002-3001
The Wafer Process Systems Inc. Model WPS-900-FA-A-2002-3001 incorporates a Rotary Servo or Pneumatic Positioning Systems for two process vessel configuration or multiple process vessel configurations. The systems is designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities.
Standard Safety and Service Features
  • Three year warranty on all system electrical components and DI water components and two year warranty on all chemical fluid components.
  • Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lockout tag out knife switch electrical power disconnect.
  • All UL, CSA or CE listed high voltage electrical components with GCFI power circuit interrupt for all heat load power circuits and component level circuit fused circuit protection.
  • Photohelic® low exhaust monitor with audible and visual alarm to interface with emergency power off circuit.
  • N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with emergency power off circuit.
  • Plenum liquid level sensor located in chemical and rinse vessel plenum to interface with emergency power off circuit with audible and visual alarm.
  • UL Listed Photo Electronic Smoke Detector to interface with emergency power off circuit.
  • FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum.
  • Casters and leg levelers for transportation and installation.
  • Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool.
  • Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges.
  • Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff.
  • Removable front or rear access plumbing panels and electrical access panels with interlock switches to interface with emergency power off circuit.
Contact Wafer Process Systems for your all your wet bench needs.